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发明名称
HALBLEITERVORRICHTUNG UND VERFAHREN ZU SEINER HERSTELLUNG.
摘要
申请公布号
DE3679087(D1)
申请公布日期
1991.06.13
申请号
DE19863679087
申请日期
1986.02.25
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP
发明人
MIZUTANI, YOSHIHISA C/O PATENT DIVISION;KOHYAMA, SUSUMU C/O PATENT DIVISION;MAKITA, KOJI C/O PATENT DIVISION, MINATO-KU TOKYO 105, JP
分类号
H01L21/28;H01L21/8247;H01L29/788;(IPC1-7):H01L29/60;H01L21/82
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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