| 摘要 |
<p>PURPOSE:To efficiently remove a hydride type poisonous gas containing a harmful component over a long period of time by bringing the hydride type poisonous gas into contact with a porous carrier impregnated with a specific amount of alkali and an oxidizing agent in a saturated state. CONSTITUTION:10-30wt.% of alkali such as sodium hydroxide and an oxidizing agent such as potassium permanganese in a saturated state are infiltrated in a porous carrier such as alumina, activated carbon, diatomaceous earth, silica- alumina, silica or zirconnia (alumina, activated carbon and silica-alumina are most desirable) to be supported thereon and the impregnated carrier is dried up to water content of 5-15% to obtain a treatment agent. This treatment agent is brought into contact with a hydride type poisonous gas containing one or more kind of silane, arsine, phosphine, diborane, hydrogen selenide and germane as a harmful component. By this method, a dry treatment method for hydride type waste gas capable of efficiently removing the poisonous gas over a long period of time can be obtained.</p> |
