Semiconductor switching apparatus.

摘要

In a pulse generator circuit for a laser unit etc., plural semiconductor switches arranged in matrix alignment on an outer surface of a first tube are connected in series and parallel with one another, and an end of each series-connection of the semiconductor switches is electrically connected to a second tube provided in coaxial alignment to the first tube, thereby realizing a synthetic semiconductor switch for switching high voltage and large current between the other end of the series-connection of the semiconductor switches and the second tube.