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发明名称
ELECTROSTATIC MULTIPOLE LENS FOR CHARGED-PARTICLE BEAM.
摘要
申请公布号
GB2238904(A)
申请公布日期
1991.06.12
申请号
GB19900025085
申请日期
1990.11.19
申请人
* JEOL LTD
发明人
MORIO * ISHIHARA
分类号
H01J49/22;H01J49/28;H01J49/42
主分类号
H01J49/22
代理机构
代理人
主权项
地址
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