An atmospheric plasma reaction method and a device therefor.

摘要

This invention provides an atmospheric plasma reaction method characterized by introducing a mixed gas of rare gas and reactive gas into a reaction vessel having a dielectric-coated electrode (6) wherein the surface of two or more electrodes located parallel therewith are provided with solid dielectrics (5), exciting said mixed gas of gases with plasma at atmospheric pressure, then transporting the active species to the downstream of the plasma and treating the surface of a substrate (7). This invention also provides an atmospheric plasma reaction device.