CARRIER PLATE TYPE INFIELD POLISHING DEVICE CAPABLE OF INPROCESS ELECTROLYTIC DRESSING BY USING ULTRA-ABRASIVE GRAIN METAL BOND GRIND STONE

摘要

PURPOSE:To attain an electrolytic dressing at any time and for proper time without interrupting a polishing work by mounting electrodes for electrolytic dressing which are respectively opposed with prescribed spaces to the grind stones of two disk members at positions where work pieces are not held between both faces of a carrier plate. CONSTITUTION:Two opposed disk members 3 each formed by bonding a plate 1 composed of conductive material and a grind stone disk 2 made of ultra- abrasive grain metal bond and a carrier plate 18 holding many work pieces 4 arranged therebetween are relatively rotated at each proper rotating direction and rotating speed so as to polish the work pieces. When the amount of ejection of abrasive grains in the grind stone disk decreases or the sharpness thereof is deteriorated due to the generation of clogging, direct current is supplied at any time to each grind stone disk and each electrode 20 for electrolytic dressing from a current supplying means 24 for a prescribed time to perform the electrolytic dressing, while the polishing work is continued.