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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH03136362(A)
申请公布日期
1991.06.11
申请号
JP19890276485
申请日期
1989.10.23
申请人
HITACHI LTD
发明人
KURODA KENICHI
分类号
H01L27/04;H01L21/822;H01L21/8234;H01L27/088;H03F3/45
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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