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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03136233(A)
申请公布日期
1991.06.11
申请号
JP19890274342
申请日期
1989.10.20
申请人
MITSUBISHI ELECTRIC CORP
发明人
ENDO YUTARO;SAITO HIROYUKI
分类号
G02F1/1343;H01L21/027;H01L21/30
主分类号
G02F1/1343
代理机构
代理人
主权项
地址
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