| 摘要 |
PURPOSE:To obtain a receptor for positive charging with blue sensitivity, superior charge retentivity and superior sensitivity by adding boron and oxygen when amorphous silicon is formed by a glow discharge decomposition method. CONSTITUTION:A photoconductor layer contg. about 10-40atomic% hydrogen, about 5X10<-2>-10<-5>atomic% oxygen and a 10-1,000ppm IIIb group element in the periodic table, especially boron is formed is amorphous silicon formed on an electrically conductive substrate by the glow discharge decomposition of gaseous SiH4. The thickness of the layer is adjusted to about 5-60mum. SiH4 and B2H6 are fed using hydrogen as a carrier gas, gaseous O2 is fed, and glow discharge is caused. The figure shows changes of (x) contg. about 10<-2>atomic% oxygen and (y) contg. no oxygen in the dark volume resistivity value with the change in the boron content. Thus, oxygen enhances the charge retentivity. |
