发明名称 Method of producing a semiconductor device using a single mask method for providing multiple masking patterns
摘要 A single mask method for providing multiple masking patterns, using excess etching techniques, which is usable for developing a semiconductor substrate for a semiconductor device which results in an increased current being required before latchup occurs in the semiconductor device.
申请公布号 US5023191(A) 申请公布日期 1991.06.11
申请号 US19890444567 申请日期 1989.12.01
申请人 FUJI ELECTRIC CO., LTD. 发明人 SAKURAI, KENYA
分类号 H01L29/78;H01L21/331;H01L21/336;H01L29/10;H01L29/739 主分类号 H01L29/78
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