发明名称 Semiconductor memory device with pillar-shaped insulating film
摘要 A semiconductor memory device having an improved capacitor configuration is provided in which storage node electrodes are formed projecting perpendicularly with respect to a substrate. Thus, the surface areas of the storage node electrodes are enlarged. As a result, memory cell chip areas can be minimized while maintaining the prescribed capacitance of storage capacitors. Further, a method of manufacturing the device is also provided.
申请公布号 US5023683(A) 申请公布日期 1991.06.11
申请号 US19890404878 申请日期 1989.09.08
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 YAMADA, TAKASHI
分类号 H01L27/04;H01L21/02;H01L21/822;H01L21/8242;H01L27/10;H01L27/108;H01L29/94 主分类号 H01L27/04
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