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发明名称
摘要
申请公布号
JPH0338651(B2)
申请公布日期
1991.06.11
申请号
JP19840182837
申请日期
1984.09.03
申请人
ULVAC CORP
发明人
NAKAMURA KYUZO;OOTA YOSHIFUMI;MOMONO TAKESHI
分类号
C23C14/00;C09D163/00;C23C14/12;G11B5/64;G11B5/66;G11B5/84;G11B5/842
主分类号
C23C14/00
代理机构
代理人
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