THIN FILM OF MULTI COMPONENT OXIDE HAVING HIGH HEAT RESISTANCE AND HIGH REFRACTIVE INDEX AND COMPOSITION AND INCANDESCENT LAMP FOR FORMING THIS FILM

摘要

PURPOSE:To provide the thin film which has excellent high-temp. thermal stability, a high refractive index and high transmittance of visible light and is particularly adequate as the high-refractive index thin film of a light interference film by forming the film of the thin film of specific Al-contg. TiO2 and the thin film of Al- and Mg-contg. TiO2. CONSTITUTION:This thin film consists of the thin film of the Al-contg. TiO2 which contains additive metals of 0.005<=M/Ti<=0.3(M denotes Al or (Al+Mg)) in atom. ratio to Ti and may contain <=10wt.% glassy material forming component in the ratio to a metal oxide or the thin film of the Al- and Mg-contg. TiO2. Thus, the thin film of the multi component oxide having the high heat resistance and high refractive index isobtd. and is adequately used as the high- refractive index thin film layer of the light interference film consisting of the multilayered films laminated alternately with the low-refractive index thin films and high-refractive index thin films consisting of the transparent thin films of the multi component oxide.