ION IMPLANTATION DEVICE,申请号JP19890274617-传众专利搜索

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发明名称	ION IMPLANTATION DEVICE
摘要
申请公布号	JPH03134947(A)	申请公布日期	1991.06.07
申请号	JP19890274617	申请日期	1989.10.20
申请人	MITSUBISHI ELECTRIC CORP	发明人	SHIRATAKE SHIGERU;MATSUDA SHINTARO;YAMAMOTO HIROHISA
分类号	H01J37/317;H01L21/265	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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