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发明名称
VACUUM VAPOR DEPOSITION SOURCE
摘要
申请公布号
JPH03134159(A)
申请公布日期
1991.06.07
申请号
JP19890272845
申请日期
1989.10.19
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KODAMA KAYOKO;INOUE ISAMU;AKUTAGAWA RYUTARO;SHINTAKU HIDENOBU
分类号
C23C14/24;C23C14/30;C23C14/54
主分类号
C23C14/24
代理机构
代理人
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