METHOD AND DEVICE FOR LOCAL THIN FILM TREATMENT,申请号JP19890269481-传众专利搜索

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发明名称	METHOD AND DEVICE FOR LOCAL THIN FILM TREATMENT
摘要
申请公布号	JPH03134155(A)	申请公布日期	1991.06.07
申请号	JP19890269481	申请日期	1989.10.17
申请人	SEIKO EPSON CORP	发明人	MORI YOSHIAKI
分类号	C23C8/12;C23C14/04;C23C16/04;C23C16/50;C23F4/00;H01L21/203	主分类号	C23C8/12
代理机构		代理人
主权项
地址

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