发明名称 CASSETTE FOR SUBSTRATE
摘要 <p>PURPOSE:To reduce the number of processes and time for assembling a cassette for substrate and to eliminate a joint hole or fine clearance to prevent treatment solution from entering by carrying out fixing between a frame and a side board with groove by heat fusing. CONSTITUTION:In a cassette composed of a frame 1 and a side board 2 with groove, the frame 1 and the side board 2 with groove are fixed by heat fusing. Heat fusing operation is; to make the frame 1 and the side board 2 with groove close to an assembly position in opposition; to interpose a heat plate between both members; to heat and dissolve a heat plate contact part of both the members simultaneously; to pull out the heat plate; and to carry out pressure- bonding of both the members. Therefore, assembly is completed at a time. Since a fine clearance is not produced in a fusing part due to heat fusing, possibility of treatment solution to enter a fine clearance is eliminated. It is possible to realize easy process control during manufacture of a substrate and to reduce a time of process in this way.</p>
申请公布号 JPH03133153(A) 申请公布日期 1991.06.06
申请号 JP19890271392 申请日期 1989.10.18
申请人 YODOGAWA KASEI KK 发明人 YOSHIDA TOSHIO;SAITO KUNIHARU
分类号 H01L21/673;H01L21/68 主分类号 H01L21/673
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