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发明名称
PATTERN FORMING METHOD
摘要
申请公布号
JPH03132908(A)
申请公布日期
1991.06.06
申请号
JP19890268924
申请日期
1989.10.18
申请人
HITACHI LTD
发明人
TOKIDA HISANO;KOYAMA NAOKI;MORIWAKI HIDETOSHI;YUHITO ISAMU
分类号
G11B5/31
主分类号
G11B5/31
代理机构
代理人
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地址
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