| 摘要 |
PURPOSE:To simplify renewing work and to reduce the flaw of a mask by deforming a sticking means elastically with an external force, and providing an elongated groove in the longitudinal direction of the flat surface of the sticking abutting with the mask. CONSTITUTION:The pellicle is comprised of a frame 12 formed in frame structure, a light transmission film 13 fixed on the surface 12a of the frame and stretching the aperture part 12c of the frame, and the sticking means 14 of frame structure fixed on the back plane 12b of the frame and sticking to the mask 10. The sticking means 14 can be deformed elastically with the external force, and also, the elongated groove 14b is provided in the longitudinal direction of the flat surface 14a of the sticking means 14 abutting with the mask 10. Therefore, when the sticking means 14 is released by abutting with and pressing the mask 10, pressure reduction between the elongated groove 14b and the mask 10 occurs, then, the pellicle 11 is fixed on the mask 10, and peeling can be easily performed by introducing the air. Thereby, it is possible to easily perform the exchange of the pellicle 11 loaded on the mask 10, and to reduce the flaw of an expensive mask 10 while performing work. |
