| 摘要 |
PURPOSE:To realize suitable line management without jamming substrates when the substrates are successively sent from the upper side of a flow, at the time of trouble occurrence in the downstream, by widening the interval between a pair of conveying means, according to a signal based on the state in the downstream, and dropping the substrates onto an auxiliary conveying means. CONSTITUTION:When substrates 2 are successively carried by conveying means (belts) 18r, 18l, and a substrate requiring signal is input to a controlling means, it controls a driving means (air cylinder) 8, and moves a guide plate 10r. As the result of it, the interval of the pair of the belts 18r, 18l is widened, so that the substrates 2 drop from the gap between the belts 18r and 18l on an auxiliary conveying means (flat belt conveyer unit) 22, and are carried by said unit 22. Thereby the substrates which are carried successively from the preceding process are prevented from jamming. |
