发明名称 |
Method or producing PN junction device. |
摘要 |
<p>An inert film is removed from a surface of an N type semiconductor layer to expose an active face. Then, a source gas containing an P type impurity component is applied to the active face to form an impurity adsorption film. Thereafter, a solid-phase diffusion of the impurity is carried out from a diffusion source composed of the N type impurity adsorption film into the N type semiconductor layer to form therein a P type semiconductor layer to thereby provide a PN junction. Lastly, a pair of electrodes are connected to the respective semiconductor layers to form an PN junction device.</p> |
申请公布号 |
EP0430167(A2) |
申请公布日期 |
1991.06.05 |
申请号 |
EP19900122649 |
申请日期 |
1990.11.27 |
申请人 |
SEIKO INSTRUMENTS INC. |
发明人 |
AOKI, KENJI, C/O SEIKO INSTRUMENTS INC.;AKAMINE, TADAO, C/O SEIKO INSTRUMENTS INC.;SAITO, NAOTO, C/O SEIKO INSTRUMENTS INC. |
分类号 |
H01L21/225;H01L21/329;H01L21/822;H01L27/04;H01L29/861;H01L29/866;H01L29/88;H01L29/93;H01L31/0248;H01L31/103;H01L31/18 |
主分类号 |
H01L21/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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