发明名称 Method or producing PN junction device.
摘要 <p>An inert film is removed from a surface of an N type semiconductor layer to expose an active face. Then, a source gas containing an P type impurity component is applied to the active face to form an impurity adsorption film. Thereafter, a solid-phase diffusion of the impurity is carried out from a diffusion source composed of the N type impurity adsorption film into the N type semiconductor layer to form therein a P type semiconductor layer to thereby provide a PN junction. Lastly, a pair of electrodes are connected to the respective semiconductor layers to form an PN junction device.</p>
申请公布号 EP0430167(A2) 申请公布日期 1991.06.05
申请号 EP19900122649 申请日期 1990.11.27
申请人 SEIKO INSTRUMENTS INC. 发明人 AOKI, KENJI, C/O SEIKO INSTRUMENTS INC.;AKAMINE, TADAO, C/O SEIKO INSTRUMENTS INC.;SAITO, NAOTO, C/O SEIKO INSTRUMENTS INC.
分类号 H01L21/225;H01L21/329;H01L21/822;H01L27/04;H01L29/861;H01L29/866;H01L29/88;H01L29/93;H01L31/0248;H01L31/103;H01L31/18 主分类号 H01L21/225
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