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发明名称
METHOD OF FORMING ELECTRODE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03132020(A)
申请公布日期
1991.06.05
申请号
JP19890269182
申请日期
1989.10.18
申请人
MATSUSHITA ELECTRON CORP
发明人
HIRAYAMA NORIYUKI;TARA KATSUJI
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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