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发明名称
PROCESS FOR THE HIGH-PRECISION MEASURING OF BI-DIMENSIONAL STRUCTURES, AND REFERENCE MASK FOR CARRYING OUT THE PROCESS
摘要
申请公布号
EP0226893(B1)
申请公布日期
1991.06.05
申请号
EP19860116741
申请日期
1986.12.02
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
DOEMENS, GUENTER, DR.;EIGENSTETTER, HERBERT;MENGEL, PETER, DR.
分类号
G01B11/00;G03F7/20;G03F9/00;H01L21/027;H01L21/67;H01L21/68
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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