发明名称 |
High-frequency amplifying semiconductor device |
摘要 |
In a high-frequency amplifying semiconductor device in which a MOS field effect transistor and a bipolar transistor are formed within the same wafer and a source electrode of the MOS field effect transistor is connected to a lead frame by a bonding wire, use is made of a wafer for fabricating the MOS field effect transistor and the bipolar transistor, in which on a semiconductor substrate of P++ type is formed a first epitaxial layer of P or P- type, a buried layer of N+ type is formed in the first epitaxial layer of the first conductivity type and a second epitaxial layer of P type is formed on the buried layer and the first epitaxial layer. The use of such a wafer, which has no P- type Si substrate, allows the source resistance of the MOS field effect transistor to be decreased. The high-frequency amplifying semiconductor device is improved in high-frequency gain and NF.
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申请公布号 |
US5021859(A) |
申请公布日期 |
1991.06.04 |
申请号 |
US19890436056 |
申请日期 |
1989.11.09 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
ITO, TAKAHIRO;YAMAKI, BUNSHIRO;YAMAMOTO, YOSHIO |
分类号 |
H01L29/73;H01L21/331;H01L21/8249;H01L27/06;H01L29/732 |
主分类号 |
H01L29/73 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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