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发明名称
SUPPLY OF SOLID ORGANIC METAL MATERIAL AND CONTAINER FOR SUPPLY
摘要
申请公布号
JPH03131018(A)
申请公布日期
1991.06.04
申请号
JP19890269916
申请日期
1989.10.17
申请人
VICTOR CO OF JAPAN LTD
发明人
KATAYAMA MIGAKU;TSUJIKAWA HIDEO
分类号
C23C16/06;H01L21/205
主分类号
C23C16/06
代理机构
代理人
主权项
地址
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