Plastic impeller pump and filtration unit for semi-conductor etching system,申请号US19890351443-传众专利搜索

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发明名称	Plastic impeller pump and filtration unit for semi-conductor etching system
摘要
申请公布号	US5021151(A)	申请公布日期	1991.06.04
申请号	US19890351443	申请日期	1989.05.12
申请人	YANE, DARYL J.	发明人	YANE, DARYL J.
分类号	B01D35/02;B01D35/26;C30B33/08	主分类号	B01D35/02
代理机构		代理人
主权项
地址

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