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发明名称
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摘要
申请公布号
JPH03131047(A)
申请公布日期
1991.06.04
申请号
JP19890269317
申请日期
1989.10.17
申请人
TOSHIBA CORP
发明人
NOMURA TORU;CHINO YASUHIRO
分类号
H01L21/60
主分类号
H01L21/60
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