| 摘要 |
PURPOSE:To perform highly accurate analysis and to enhance reliability as an apparatus by detecting the ionizied particle detector at least covered with a neutron shield body. CONSTITUTION:The neutral particle discharged from plasma is incident to a stripping cell 21 through a measuring port 10 and subjected to charge exchange to become an ionized particle. This ionized particle enters a deflecting electromagnet 22 to be deflected by 90 deg.. Subsequently, the advance direction thereof is deflected to the direction vertical to the surface of the paper by an electrostatic deflection plate 31. The ionized particle deflected by predeter mined quantity is incident to a particle detector 32 and the incident position thereof is detected. Since the detector 32 is received in the second vacuum container 30 covered with a neutron shield body 35, the detector 32 is shielded from a neutron. gamma-rays generated in the shield body 35 are shielded by a gamma-ray shield body 34. Since no neutron is incident to the detector 32, only the incidence of the ionized particle is detected. The energy and mass of the neutral particle are calculated on the basis of the detected incident position.
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