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发明名称
METHOD FOR KEEPING CLEANNESS IN EACH CHAMBER CONSTITUTING MULTI-CHAMBERS TYPE VACUUM HEAT TREATMENT FURNACE
摘要
申请公布号
JPH03130317(A)
申请公布日期
1991.06.04
申请号
JP19890168023
申请日期
1989.06.29
申请人
ULVAC JAPAN LTD
发明人
KATO TAKEO
分类号
C21D1/773
主分类号
C21D1/773
代理机构
代理人
主权项
地址
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