GASEOUS PHASE GROWTH DEVICE,申请号JP19890269394-传众专利搜索

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发明名称	GASEOUS PHASE GROWTH DEVICE
摘要
申请公布号	JPH03131017(A)	申请公布日期	1991.06.04
申请号	JP19890269394	申请日期	1989.10.17
申请人	FUJITSU LTD	发明人	NARITA SATOYASU
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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