发明名称 PATTERN PRINTING PLATE FOR SHADOW MASK AND PRODUCTION THEREOF
摘要 <p>PURPOSE:To lessen the generation of pattern defects by sticking of foreign matter and to shorten time for vacuum adhesion at the time of exposing by forming an antisticking film consisting of a silicone film on the surface of the printing plate for shadow mask patterns. CONSTITUTION:An under coating layer 2 is formed on a flat plate glass base material 1. The parts of this emulsion layer 3 corresponding to the apertures of a shadow mask are opaque emulsion parts 4 and the other parts are transparent emulsion parts 5. The protective film 6 which is formed by adding a hardening material to gelatin and has <=1mum thickness is formed thereon. The flaw generation preventive film 11 which consists of the transparent amorphous glassy material formed of metal alcoholate and has 0.3 to 1.5mum film thickness is formed on the surface of the protective film 6 in this case. The antisticking film 12 which consists of the silicone film of a dimethyl silicone polymer and has 0.005 to 0.1mum film thickness is formed on the surface of this flaw generation preventive film 11. The sticking of the foreign matter is prevented in this way ant the generation of the defects in the patterns themselves on the printing plate is lessened. The time for the vacuum adhesion is shortened.</p>
申请公布号 JPH03129348(A) 申请公布日期 1991.06.03
申请号 JP19890267718 申请日期 1989.10.13
申请人 TOSHIBA CORP 发明人 OTAKE YASUHISA;KIYOKUKI YASUSHI
分类号 G03F1/00;H01J9/14 主分类号 G03F1/00
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