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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03129739(A)
申请公布日期
1991.06.03
申请号
JP19900024954
申请日期
1990.02.02
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
SHIMIZU NORITOMO;MIZUNO BUNJI;AKIYAMA SHIGENOBU;TSUJI KAZUHIKO
分类号
H01L21/322;H01L21/265
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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