MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19890268373-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH03129851(A)	申请公布日期	1991.06.03
申请号	JP19890268373	申请日期	1989.10.16
申请人	FUJITSU LTD	发明人	SATO SUSUMU
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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