| 摘要 |
PURPOSE:To effectively remove dust generated by a discharge of laser medium gas and to obtain a stable laser light output by providing a space containing a filter in a hermetically sealed vessel, providing an opening perpendicular to the flowing direction of the gas of a through fan over the entire longitudinal area of a discharger, and connecting the opening to the space. CONSTITUTION:Ducts 3 7, 18 for connecting a discharge opening 17a and an introducing opening 18a to a space 14 are respectively provided at the discharge and suction sides of a through fan 12, the opening 17a is perpendicular to the flowing direction of laser medium gas to be circulated by the fan 12 in a hermetically sealed vessel 1, and one or a plurality of the openings are provided over the entire longitudinal area of a discharger 4. Part of the gas discharged from the fan 12 is circulated in a circle of the opening 18a the duct 18 the space 14 a filter 19 the space 14 the duct 17 the opening 17a by means of the difference of static pressure between the discharge side and the suction side of the fan 12. ln this case, dust in the gas generated by the discharge is removed by the filter 19. |
