| 摘要 |
PURPOSE: To obtain a reconfigurable device by at least two inspection modules having a first switching matrix(SM) and a pin group electronic circuit - a pin electronic circuit connecting to a pin electronic circuit by the first switching matrix and a second SM and an inspection head connectable to a pin electronic circuit by the second SM. CONSTITUTION: An inspection device consists of a pin group electronic device 11 that can be multiplexed between two inspection bead configurations, inspection heads 13 and 15-17, and a pin electronic device 10. Then, when the device 10 is switched to a side A, three different devices perform inspection simultaneously and independently for the heads 15-17. In this case, 512 pins of the device 10 are divided into tow 128-pin inspection heads and one 256-pin inspection head. Also, when the device 10 is switched to a side B, one device is inspected and the 512-pin inspection head 13 is inspected, thus obtaining a reconfigurable device. |
