摘要 |
PURPOSE:To obtain excellent output characteristics with a photovoltaic device without giving any damages to transparent electrodes by partially overlapping an insulating body with a conductive body in advance and irradiating the overlapped section with a laser beam. CONSTITUTION:After patterning transparent electrodes 2a and 2b, a conductive body 5 and insulating body 6 are formed on the electrodes 2a and 2b so that part of the conductive body 5 can be put on the insulating body 6 and an amorphous semiconductor layer 3 and rear electrode 4 are cut by fusion by irradiating the overlapped section with a laser beam. At the time of the irradiation, no influence is given to the underlying electrodes 2a and 2b by the laser beam, since the overlapped section which is not irradiated with the laser beam is thick in film thickness. Since the laser beam does not damage the electrodes 2a and 2b, this photovoltaic device having excellent output characteristics can be manufactured with a high yield. |