发明名称 MULTIPLE ELECTRON SOURCE
摘要 PURPOSE:To easily irradiate a moving article with an electron beam through a simple improvement by so setting an arraying direction of electron sources disposed along a longitudinal row as not to cross the arraying direction of electron sources disposed along a lateral row. CONSTITUTION:The arraying direction of electron sources 3 disposed along a longitudinal row is so set as not to cross the arraying direction of electron sources 10 disposed along a lateral row. Thus, since the lateral and longitudinal directions of the matrixlike sources 3, 10 disposed on a board 1 are not perpendicularly crossed, if a moving article is continuously radiated with an electron beam from the sources 3, 10, the entire sources 3, 10 of one row can be sequentially driven (linearly and sequentially drive) under a pure control within time moving the article between the source 3 and the adjacent source 10. Thus, continuous electron beam irradiation region is formed by simple means, and signal setting for control is simplified, and further a control circuit is simplified due to the simplification.
申请公布号 JPH03127816(A) 申请公布日期 1991.05.30
申请号 JP19890267575 申请日期 1989.10.13
申请人 CANON INC 发明人 TSUKAMOTO TAKEO;WATANABE NOBUO;OKUNUKI MASAHIKO
分类号 G11B7/125;G11B7/14;H01L21/027 主分类号 G11B7/125
代理机构 代理人
主权项
地址