SPECIMEN REVIEW STATION

摘要

A specimen review station (50) includes a vibration isolation table (64) that supports storage (80) and transportation (82, 84) equipments for a semiconductor wafer (54) and an optical system (58) for viewing microscopic regions of the patterned surface of the wafer. The optical system (58) includes an image extender (88) that enables an operator sitting on an adjustable chair (107) to view the wafer from a distance, thereby facilitating remote transportation and inspection of relatively large diameter wafers and reducing operator contamination of the wafer. An operator table (66) supports control equipments (96, 98, 100), which the operator uses to control the functions of the specimen review station. The vibration isolation table and the operator table are spatially isolated from each other in that they are connected only by the floor (70) that supports both of them. The vibration isolation table is, therefore, affected by neither floor vibrations resulting from normal building movement associated with manufacturing operations nor operator contact with the operator table.