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发明名称
VERFAHREN ZUR NASSCHEMISCHEN BEHANDLUNG VON HALBLEITERSCHEIBEN
摘要
申请公布号
DD290342(A7)
申请公布日期
1991.05.29
申请号
DD19890327492
申请日期
1989.04.11
申请人
HALBLEITERWERK FRANKFURT(ODER),DE
发明人
GEBEL,DIETRICH,DE;SCHOEN,HANS-PETER,DE
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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