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发明名称
HEAT TREATMENT OF SINGLE CRYSTAL OF III-V COMPOUND SEMICONDUCTOR AND WAFER OF III-V COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH03126700(A)
申请公布日期
1991.05.29
申请号
JP19890262338
申请日期
1989.10.06
申请人
HITACHI CABLE LTD
发明人
TAWARASAKO SHUICHI;SEKI MINORU
分类号
C30B33/02
主分类号
C30B33/02
代理机构
代理人
主权项
地址
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