| 摘要 |
PURPOSE:To attain a ratio of C to H corresponding to set conditions in an always stable plasma state in a system and to form a uniform diamond film having superior properties by mixing gaseous hydrocarbon with working gas composed of rare gas and gaseous hydrogen when diamond is synthesized with high frequency hot plasma. CONSTITUTION:A chamber 10 is kept vacuum, valves 3, 4 are opened to introduce gaseous hydrogen and rare gas from a nozzle tube 6 and a flow of the gaseous mixture is formed in a plasma generation chamber 7. High frequency is then impressed on a work coil 2 to generate plasma. A valve 5 and/or a valve 5' is opened, a prescribed amt. of gaseous hydrocarbon is mixed with the working gas and introduced into the chamber 7 from the tube 6 and a diamond film is formed on a substrate 8. |
