| 摘要 |
PURPOSE:To easily and effectively perform the alteration to an ultrasonic probe having a different characteristic by moving a substrate provided with a plurality of ultrasonic probes having different characteristics to make it possible to select the arbitrary one probe. CONSTITUTION:A plurality of ultrasonic probes 22A - 22D different in characteristics such as use frequency, resolving power or a use purpose are provided to a sensor block 20 and one of them, for example, the probe 22A is guided to the observing position of a sample 10 by rotating a holder 21 and the voids or cracks present at the specific plane position of the surface and interior of the sample are detected by ultrasonic beam. When the observation due to the probe 22A is completed, a pulse motor 32 is driven by the order of a controller 33 to rotate the holder 21 by 90 deg. and, for example, the lens of the separate probe 22D having different frequency is used to observe the sample 10. As mentioned above, since the probes 22A - 22D different in characteristics can be used while continuously changed over by rotating the block 20, image data different in resolving power are obtained at once and the labor of lens replacement can be omitted and effective measurement can be performed. |
