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发明名称
APPARATUS FOR INSPECTING FOREIGN MATTER
摘要
申请公布号
JPH03125945(A)
申请公布日期
1991.05.29
申请号
JP19890262981
申请日期
1989.10.11
申请人
HITACHI ELECTRON ENG CO LTD
发明人
YANAI TOSHIAKI
分类号
G01N21/88;G01N21/94;G01N21/956;H01L21/66
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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