摘要 |
<p>An ultra-high purity valved reducing tee with applications in the semiconductor industry is machined from a unitary block of metal. Portions of the block define the inlet and outlet ports of the valve. A main feed bore extends straight through the block. A passage within the block connects the main feed bore to the inlet port of the valve. A branch bore extends into the block to an outlet port of the valve. The cross sectional area of the main feed bore is at least 1.5 times the cross sectional area of the branch bore. The branch bore lies in a plane that is perpendicular to the axis of the main feed bore. Two such valved reducing tees may be formed in a block with a common main feed bore to provide a valved reducing cross. In another embodiment, a single block with a common main feed is provided with a number of valved branches, resulting in a valved manifold distribution system.</p> |