发明名称 CARRYING DEVICE FOR SEMICONDUCTOR WAFER STICKING AND HOLDING RING FRAME
摘要 <p>PURPOSE:To eliminate the generation of dust to be caused by a slip between a ring frame and a belt and enable transport with high degree of cleanness by attaching a permanent magnet for absorbing the frame to the belt through a slider. CONSTITUTION:When a sensor S2 detects that a ring frame F exists in a frame housing part A under the condition that a slider 18 is in the starting position on a frame 14, the frame 14 is raised to a certain height where the frame 14 is made horizontal by an air cylinder 17, and the ring frame F on the lowest stage in a cassette 1 is absorbed and held to the top surface of the slider 18 by a permanent magnet 20, and also a belt 3 is started in normal rotation in the progressing direction. The ring frame F absorbed and held is fed out to a frame placing stand 6, and at this stage, the frame placing stand 6 is set a little lower than the top surfaces of the slider 18 and the belt 3, and the ring frame F progresses without making contact with the frame placing stand 6.</p>
申请公布号 JPH03124625(A) 申请公布日期 1991.05.28
申请号 JP19890263531 申请日期 1989.10.09
申请人 NITTO DENKO CORP 发明人 ITO HIDEO;OKAMOTO KENICHI;MIYAMOTO SABURO
分类号 B65H3/16;B65G59/06;H01L21/68;H01L21/683 主分类号 B65H3/16
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