| 摘要 |
PURPOSE:To sharply improve work efficiency and also to prevent the damage of a wafer and the generation of dust by manual operation by automatically performing the taking in and out of a semiconductor wafer from a wafer carrier to a wafer boat and the transfer to a wafer boat, that is, a wafer boat inserting and removing device. CONSTITUTION:Four pieces of wafer carriers 10, which contain semiconductors 5 for one lot each, are placed at a wafer carrier placing part 7 so that the wafers 5 may be vertical. Moreover, a vacant wafer boat 4 is stored in a horizontal-vertical converting means 9 and is retained horizontally. When a transfer head 8 is lowered onto one carrier 10 in this condition, the first wafer pusher 11 ascends, and pushes up the semiconductor wafers 5 for one lot inside the wafer carrier 10, and inserts them into the transfer head 8. After this, the wafer stopper 12 of the transfer head 8 enters, and abuts on the bottom of the semiconductor 5, and retains the semiconductor wafers 5 inside the transfer head 8. When this retention is done, the first wafer pusher 11 descends, and then the transfer head 8 ascends and rotates, and reaches the upper position of the vacant wafer boat 4 stored in the horizontal-vertical conversion means 9.
|
