Method of optically coupling optical fiber to waveguide on substrate, and optical device produced by the method

摘要

A method of optically coupling one end of an optical fiber to a waveguide formed on a substrate, such that an end portion of the fiber is fitted in a groove formed in the substrate. The groove is formed by forming a beam-shielding mask having a cutout, on the substrate such that the cutout is aligned with a part of the substrate in which the groove is formed, and by irradiating the above-indicated part of the substrate with a high-energy beam. Alternatively, the groove is formed by a cutting tool. An inclined end surface of the groove left uncut by the tool may be irradiated with a high-energy beam, through a beam-shielding mask which has a cutout aligned with the inclined end surface. The end of the optical fiber, which has a flat face or has a coned or hemi-spherical shape, is positioned for optical coupling with a portion of the waveguide which is exposed to the groove.