| 摘要 |
An apparatus (18) for separating an individual chip (14) from a semiconductor wafer (10) adhered to a diaphragm (16) comprises a "C"-shaped arm (26) having parallel, spaced-apart upper and lower arm portions (28) and (29). The upper arm portion (28) is provided with a yoke (34) at its free end for engaging a robot (42) which carries a pickup tool (46). The free end of the lower arm portion (29) mounts a die ejector (38) lying directly beneath the pickup tool (46) when the robot (42) engages the upper arm portion (28). Once the die ejector (38) is positioned below, and the pickup tool (46) is positioned above, a particular chip (14), actuation of the die ejector causes the chip to be separated and urged upwardly for engagement by the pickup tool. In this way, the need to separately position the die ejector (38) and the pickup tool (46) is obviated.
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