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发明名称
HEAT-RESISTANCE TESTING APPARATUS
摘要
申请公布号
JPH03124042(A)
申请公布日期
1991.05.27
申请号
JP19890262488
申请日期
1989.10.06
申请人
MATSUSHITA ELECTRIC WORKS LTD
发明人
YAMAMOTO MATSUKI
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
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