CLEANING AND DRYING METHOD AND CLEANING DEVICE,申请号JP19890261962-传众专利搜索

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发明名称	CLEANING AND DRYING METHOD AND CLEANING DEVICE
摘要
申请公布号	JPH03124030(A)	申请公布日期	1991.05.27
申请号	JP19890261962	申请日期	1989.10.09
申请人	TOKYO ELECTRON LTD;SUGAI:KK	发明人	MATSUO TAKENOBU;WAKABAYASHI TAKESHI;SHIMURA KAZUE;KONDO HISASHI;NAKARAI MASAZUMI;YAMAGUCHI HIROSHI;KOYANAGI TETSUO;TAKETATSU TOSHIO
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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